반도체 공정기술 교육원
Semiconductor Process Technology Education

FAB Facilities
SPTA
SPTA

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에어샤워
에어샤워

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Probe Station
Probe Station

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SPTA
SPTA

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1/35

장비 반입, Set-up (2020.5.29~6.9)

6/5 RTA 밎 Evaporator
6/5 RTA 밎 Evaporator
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6/5 Dry Etcher
6/5 Dry Etcher
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6/5 LPCVD 및 PECVD
6/5 LPCVD 및 PECVD
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6/9 CMP 및 Post cleaner
6/9 CMP 및 Post cleaner
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6/4 마스크 Aligner set-up
6/4 마스크 Aligner set-up
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6/4 Developer 및 DI water generator set-up
6/4 Developer 및 DI water generator set-up
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Semiconductor Process Technology Academy Inc.