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Semiconductor Process Technology Academy Inc.
FAB Facilities
SPTA
에어샤워
Probe Station
SPTA
1/35
장비 반입, Set-up (2020.5.29~6.9)
6/5 RTA 밎 Evaporator
6/5 Dry Etcher
6/5 LPCVD 및 PECVD
6/9 CMP 및 Post cleaner
6/4 마스크 Aligner set-up
6/4 Developer 및 DI water generator set-up
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