SPTA

Air shower

방진복

Yellow Room

Oven

Singe

Spin Coater

PR & SOG Coating

Hot Plate

Bake

Align & Exposer System

Wet Station

DEvelop & Rinse

DI Water System

Microscope

Inspection

냉장고

Photo Mask

Wet Station

Develop & Rinse

Dry Etch

Oxide, Nitride, Si Etch

RTA

Annealing & Sintering

PECVD

LPCVD

Poly-Si & SiN Deposition

Furnace

Oxidation

E-Beam Evaporator

4-Point Probe

저항 측정

Ellipsometer

두께 측정

CMP & Cleaner

PCW

Gas Cabinet

반도체소자 특성측정기

반도체소자 특성측정기

Semiconductor Parameter Analyzer

HP4145 전류-전압 특성 측정

Multi Frequency LCR Meter

HP4284 커패시턴스-전압 특성 측정

Probe Station

웨이퍼 프로빙

Probe Station

Probe Station

Probe Station

Wire Ball Bonder

PCB 패키징 Kulicke&Soffa - Model 4522

Classroom

Classroom1

Classroom2