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Semiconductor Process Technology Academy Inc.
FAB Facilities

SPTA

Air shower

와이어본딩 장비

SPTA
History

25.11 와이어본딩장비

20.6.9 CMP 및 Post cleaner

20.6.5 RTA 밎 Evaporator

20.6.5 Dry Etcher

20.6.5 LPCVD 및 PECVD

20.6.4 마스크 Aligner set-up

20.6.4 Developer 및 DI water generator set-up

20.6.4 Wet Bath set-up

20.6.4 Gas scrubber set-up
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