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FAB Facilities
SPTA
Air shower
Probe Station
SPTA
History
20.6.9 CMP 및 Post cleaner
20.6.5 RTA 밎 Evaporator
20.6.5 Dry Etcher
20.6.5 LPCVD 및 PECVD
20.6.4 마스크 Aligner set-up
20.6.4 Developer 및 DI water generator set-up
20.6.4 Wet Bath set-up
20.6.4 Gas scrubber set-up
20.5.27 cooling water 및 gas line 배관 작업
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