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Semiconductor Process Technology Academy Inc.
Facilities
 SPTA |  Air shower |  방진복 |
|---|---|---|
 Yellow Room |  OvenSinge |  Spin CoaterPR & SOG Coating |
 Hot PlateBake |  Align & Exposer System |  Wet StationDEvelop & Rinse |
 DI Water System |  MicroscopeInspection |  냉장고 |
 Photo Mask |  Wet StationDevelop & Rinse |  Dry EtchOxide, Nitride, Si Etch |
 RTAAnnealing & Sintering |  PECVD |  LPCVDPoly-Si & SiN Deposition |
 FurnaceOxidation |  E-Beam Evaporator |  4-Point Probe저항 측정 |
 Ellipsometer두께 측정 |  CMP & Cleaner |  PCW |
 Gas Cabinet |  반도체소자 특성측정기 |  반도체소자 특성측정기 |
 Semiconductor Parameter AnalyzerHP4145 전류-전압 특성 측정 |  Multi Frequency LCR MeterHP4284 커패시턴스-전압 특성 측정 |  Probe Station웨이퍼 프로빙 |
 Probe Station |  Probe Station |  Probe Station |
 Wire Ball BonderPCB 패키징 Kulicke&Soffa - Model 4522 |  Classroom |  Classroom1 |
 Classroom2 |
History
24.11 와이어본딩장비
20.6.9 CMP 및 Post cleaner
20.6.5 RTA 밎 Evaporator
20.6.5 Dry Etcher
20.6.5 LPCVD 및 PECVD
20.6.4 마스크 Aligner set-up
20.6.4 Developer 및 DI water generator set-up
20.6.4 Wet Bath set-up
20.6.4 Gas scrubber set-up
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