top of page
반도체 공정기술 교육원
Semiconductor Process Technology Education
FAB Facilities

SPTA

에어샤워

Probe Station

SPTA
1/35
장비 반입, Set-up (2020.5.29~6.9)

6/5 RTA 밎 Evaporator

6/5 Dry Etcher

6/5 LPCVD 및 PECVD

6/9 CMP 및 Post cleaner

6/4 마스크 Aligner set-up

6/4 Developer 및 DI water generator set-up

Semiconductor Process Technology Academy Inc.
bottom of page